Global EUV Mask Defect Inspection Equipment Market 2024 by Manufacturers, Regions, Type and Application, Forecast to 2030

Description

Mask, also known as Photomask or Reticle, is a graphic master used in the lithography process commonly used in microelectronics processing technology. As a carrier of graphic information, Mask transfers the graphic to the base material through the exposure process, thereby realizing the transfer of the graphic.

Mask defect detection is a key link in the semiconductor lithography process, which aims to check the Mask and identify and repair the defects on it. As a critical component in the lithography process, Mask is responsible for accurately transferring the circuit pattern to the wafer, and its quality is directly related to the accuracy of the wafer pattern and the performance of the final device. There are various types of defects, including particle contamination, pattern breakage, bridging problems, and defects in the mask material itself.

EUV Mask defect detection equipment is a special equipment that plays an important role in the high-end semiconductor process technology. Given the high precision required by EUV lithography technology, even the smallest defect on the Mask may significantly affect the quality of the circuit pattern on the wafer, and thus adversely affect the performance and yield of the chip. Therefore, the use of special detection equipment to strictly inspect the EUV Mask is an indispensable key link to ensure the quality of semiconductor manufacturing.

According to our (Global Info Research) latest study, the global EUV Mask Defect Inspection Equipment market size was valued at US$ 1603 million in 2023 and is forecast to a readjusted size of USD 3496 million by 2030 with a CAGR of 12.9% during review period.

At present, optical detection is the mainstream in semiconductor detection technology. The types of semiconductor optical detection include pattern, non-pattern and mask detection. Among them, pattern defect detection is divided into bright field and dark field detection. Both are analyzed through optical signals. The difference is that the bright field is a vertically reflected light signal, while the dark field is a scattered light signal.

In the semiconductor lithography process, corresponding light sources need to be used for different masks. Different mask applications vary greatly, and can be generally divided into binary masks, phase-shift masks and EUV masks. EUV Mask is a new type of mask designed specifically for EUV (extreme ultraviolet) lithography technology. Given the extremely short wavelength of EUV and its easy absorption by a variety of materials, traditional refractive elements such as lenses cannot be used. Instead, according to the Bragg law, the reflection of the light beam is achieved through a multi-layer (ML) structure (unlike EUV, DUV uses transmitted light). This type of mask is widely used in 7nm, 5nm, 3nm and 2nm (TSMC plans to mass produce in 2025) high-end manufacturing processes.

At present, mask detection technology is mainly optical detection and SEM detection. Among them, the optical inspection companies are mainly Lasertec and KLA, while SEM inspection is Advantest. From the perspective of downstream applications, as long as the mask uses Pellicle, EUV Mask inspection equipment is required (in other words, as long as there is an EUV lithography machine, EUV inspection equipment must be used), but at present, not all EUV Masks of downstream terminal manufacturers will be used with Pellicle.

In DUV lithography or optical Mask technology, Pellicle plays a key role. The Mask inspection tool operates at an exposure wavelength of 193nm, and inspection is performed through this layer of film. For the wafer fab, this is a direct and efficient process. However, in extreme ultraviolet (EUV) lithography technology, the manufacturing process of the Mask needs to be carried out in a dedicated Mask workshop. At this point, the inspection of the Mask becomes more complicated because it requires a high-resolution system. In the wafer fab environment, the ideal situation is to use a layer of Pellicle to protect the Mask from particle contamination, while allowing the inspection system to work through this layer of Pellicle. If there are no defects, you can proceed; if defects are detected, you need to remove the pellicle and send the Mask to the Mask workshop for cleaning.

EUV Mask defect detection equipment is mainly used in Mask Shop and Fab. The Fab includes the mask production line and the wafer manufacturing production line. For the Fab, there are two main reasons for using EUV Mask defect detection equipment. First, once the pellicle is attached to the Mask, other types of equipment (such as electron beam or DUV equipment) except EUV detection equipment are difficult to achieve high-sensitivity detection effects. This is because the presence of pellicles interferes with the detection capabilities of these devices, making it difficult for them to accurately identify tiny defects. Secondly, EUV detection equipment has higher detection accuracy and can detect defects and particles that traditional DUV Mask detection methods cannot capture. Mask Shop has always had a relatively large share, reaching about 61% in 2023. However, with the acceleration of commercialization of smaller advanced process nodes, it is expected that the share of Fab will reach 42% by 2030.

At present, the EUV Mask defect detection equipment market is mainly monopolized by KLA and Lasertec. EUV Mask defect detection equipment is a high-precision and advanced equipment with a long delivery time. For example, Lasertec's delivery time is two years. In the next few years, the two leading companies will still maintain a monopoly in the EUV Mask defect detection market.

This report is a detailed and comprehensive analysis for global EUV Mask Defect Inspection Equipment market. Both quantitative and qualitative analyses are presented by manufacturers, by region & country, by Type and by Application. As the market is constantly changing, this report explores the competition, supply and demand trends, as well as key factors that contribute to its changing demands across many markets. Company profiles and product examples of selected competitors, along with market share estimates of some of the selected leaders for the year 2024, are provided.

Key Features:
Global EUV Mask Defect Inspection Equipment market size and forecasts, in consumption value ($ Million), sales quantity (Units), and average selling prices (USD/Unit), 2019-2030
Global EUV Mask Defect Inspection Equipment market size and forecasts by region and country, in consumption value ($ Million), sales quantity (Units), and average selling prices (USD/Unit), 2019-2030
Global EUV Mask Defect Inspection Equipment market size and forecasts, by Type and by Application, in consumption value ($ Million), sales quantity (Units), and average selling prices (USD/Unit), 2019-2030
Global EUV Mask Defect Inspection Equipment market shares of main players, shipments in revenue ($ Million), sales quantity (Units), and ASP (USD/Unit), 2019-2024
The Primary Objectives in This Report Are:
To determine the size of the total market opportunity of global and key countries
To assess the growth potential for EUV Mask Defect Inspection Equipment
To forecast future growth in each product and end-use market
To assess competitive factors affecting the marketplace
This report profiles key players in the global EUV Mask Defect Inspection Equipment market based on the following parameters - company overview, sales quantity, revenue, price, gross margin, product portfolio, geographical presence, and key developments. Key companies covered as a part of this study include Lasertec, KLA-Tencor, Advantest, etc.

This report also provides key insights about market drivers, restraints, opportunities, new product launches or approvals.

Market Segmentation
EUV Mask Defect Inspection Equipment market is split by Type and by Application. For the period 2019-2030, the growth among segments provides accurate calculations and forecasts for consumption value by Type, and by Application in terms of volume and value. This analysis can help you expand your business by targeting qualified niche markets.

Market segment by Type
    5-7nm Process
    3nm and Below Process

Market segment by Application
    Mask Shop
    Fab

Major players covered
    Lasertec
    KLA-Tencor
    Advantest

Market segment by region, regional analysis covers
North America (United States, Canada, and Mexico)
Europe (Germany, France, United Kingdom, Russia, Italy, and Rest of Europe)
Asia-Pacific (China, Japan, Korea, India, Southeast Asia, and Australia)
South America (Brazil, Argentina, Colombia, and Rest of South America)
Middle East & Africa (Saudi Arabia, UAE, Egypt, South Africa, and Rest of Middle East & Africa)
The content of the study subjects, includes a total of 15 chapters:
Chapter 1, to describe EUV Mask Defect Inspection Equipment product scope, market overview, market estimation caveats and base year.
Chapter 2, to profile the top manufacturers of EUV Mask Defect Inspection Equipment, with price, sales quantity, revenue, and global market share of EUV Mask Defect Inspection Equipment from 2019 to 2024.
Chapter 3, the EUV Mask Defect Inspection Equipment competitive situation, sales quantity, revenue, and global market share of top manufacturers are analyzed emphatically by landscape contrast.
Chapter 4, the EUV Mask Defect Inspection Equipment breakdown data are shown at the regional level, to show the sales quantity, consumption value, and growth by regions, from 2019 to 2030.
Chapter 5 and 6, to segment the sales by Type and by Application, with sales market share and growth rate by Type, by Application, from 2019 to 2030.
Chapter 7, 8, 9, 10 and 11, to break the sales data at the country level, with sales quantity, consumption value, and market share for key countries in the world, from 2019 to 2024.and EUV Mask Defect Inspection Equipment market forecast, by regions, by Type, and by Application, with sales and revenue, from 2025 to 2030.
Chapter 12, market dynamics, drivers, restraints, trends, and Porters Five Forces analysis.
Chapter 13, the key raw materials and key suppliers, and industry chain of EUV Mask Defect Inspection Equipment.
Chapter 14 and 15, to describe EUV Mask Defect Inspection Equipment sales channel, distributors, customers, research findings and conclusion.

Table of Contents

1 Market Overview
    1.1 Product Overview and Scope
    1.2 Market Estimation Caveats and Base Year
    1.3 Market Analysis by Type
        1.3.1 Overview: Global EUV Mask Defect Inspection Equipment Consumption Value by Type: 2019 Versus 2023 Versus 2030
        1.3.2 5-7nm Process
        1.3.3 3nm and Below Process
    1.4 Market Analysis by Application
        1.4.1 Overview: Global EUV Mask Defect Inspection Equipment Consumption Value by Application: 2019 Versus 2023 Versus 2030
        1.4.2 Mask Shop
        1.4.3 Fab
    1.5 Global EUV Mask Defect Inspection Equipment Market Size & Forecast
        1.5.1 Global EUV Mask Defect Inspection Equipment Consumption Value (2019 & 2023 & 2030)
        1.5.2 Global EUV Mask Defect Inspection Equipment Sales Quantity (2019-2030)
        1.5.3 Global EUV Mask Defect Inspection Equipment Average Price (2019-2030)

2 Manufacturers Profiles
    2.1 Lasertec
        2.1.1 Lasertec Details
        2.1.2 Lasertec Major Business
        2.1.3 Lasertec EUV Mask Defect Inspection Equipment Product and Services
        2.1.4 Lasertec EUV Mask Defect Inspection Equipment Sales Quantity, Average Price, Revenue, Gross Margin and Market Share (2019-2024)
        2.1.5 Lasertec Recent Developments/Updates
    2.2 KLA-Tencor
        2.2.1 KLA-Tencor Details
        2.2.2 KLA-Tencor Major Business
        2.2.3 KLA-Tencor EUV Mask Defect Inspection Equipment Product and Services
        2.2.4 KLA-Tencor EUV Mask Defect Inspection Equipment Sales Quantity, Average Price, Revenue, Gross Margin and Market Share (2019-2024)
        2.2.5 KLA-Tencor Recent Developments/Updates
    2.3 Advantest
        2.3.1 Advantest Details
        2.3.2 Advantest Major Business
        2.3.3 Advantest EUV Mask Defect Inspection Equipment Product and Services
        2.3.4 Advantest EUV Mask Defect Inspection Equipment Sales Quantity, Average Price, Revenue, Gross Margin and Market Share (2019-2024)
        2.3.5 Advantest Recent Developments/Updates

3 Competitive Environment: EUV Mask Defect Inspection Equipment by Manufacturer
    3.1 Global EUV Mask Defect Inspection Equipment Sales Quantity by Manufacturer (2019-2024)
    3.2 Global EUV Mask Defect Inspection Equipment Revenue by Manufacturer (2019-2024)
    3.3 Global EUV Mask Defect Inspection Equipment Average Price by Manufacturer (2019-2024)
    3.4 Market Share Analysis (2023)
        3.4.1 Producer Shipments of EUV Mask Defect Inspection Equipment by Manufacturer Revenue ($MM) and Market Share (%): 2023
        3.4.2 Top 3 EUV Mask Defect Inspection Equipment Manufacturer Market Share in 2023
        3.4.3 Top 6 EUV Mask Defect Inspection Equipment Manufacturer Market Share in 2023
    3.5 EUV Mask Defect Inspection Equipment Market: Overall Company Footprint Analysis
        3.5.1 EUV Mask Defect Inspection Equipment Market: Region Footprint
        3.5.2 EUV Mask Defect Inspection Equipment Market: Company Product Type Footprint
        3.5.3 EUV Mask Defect Inspection Equipment Market: Company Product Application Footprint
    3.6 New Market Entrants and Barriers to Market Entry
    3.7 Mergers, Acquisition, Agreements, and Collaborations

4 Consumption Analysis by Region
    4.1 Global EUV Mask Defect Inspection Equipment Market Size by Region
        4.1.1 Global EUV Mask Defect Inspection Equipment Sales Quantity by Region (2019-2030)
        4.1.2 Global EUV Mask Defect Inspection Equipment Consumption Value by Region (2019-2030)
        4.1.3 Global EUV Mask Defect Inspection Equipment Average Price by Region (2019-2030)
    4.2 North America EUV Mask Defect Inspection Equipment Consumption Value (2019-2030)
    4.3 Europe EUV Mask Defect Inspection Equipment Consumption Value (2019-2030)
    4.4 Asia-Pacific EUV Mask Defect Inspection Equipment Consumption Value (2019-2030)
    4.5 South America EUV Mask Defect Inspection Equipment Consumption Value (2019-2030)
    4.6 Middle East & Africa EUV Mask Defect Inspection Equipment Consumption Value (2019-2030)

5 Market Segment by Type
    5.1 Global EUV Mask Defect Inspection Equipment Sales Quantity by Type (2019-2030)
    5.2 Global EUV Mask Defect Inspection Equipment Consumption Value by Type (2019-2030)
    5.3 Global EUV Mask Defect Inspection Equipment Average Price by Type (2019-2030)

6 Market Segment by Application
    6.1 Global EUV Mask Defect Inspection Equipment Sales Quantity by Application (2019-2030)
    6.2 Global EUV Mask Defect Inspection Equipment Consumption Value by Application (2019-2030)
    6.3 Global EUV Mask Defect Inspection Equipment Average Price by Application (2019-2030)

7 North America
    7.1 North America EUV Mask Defect Inspection Equipment Sales Quantity by Type (2019-2030)
    7.2 North America EUV Mask Defect Inspection Equipment Sales Quantity by Application (2019-2030)
    7.3 North America EUV Mask Defect Inspection Equipment Market Size by Country
        7.3.1 North America EUV Mask Defect Inspection Equipment Sales Quantity by Country (2019-2030)
        7.3.2 North America EUV Mask Defect Inspection Equipment Consumption Value by Country (2019-2030)
        7.3.3 United States Market Size and Forecast (2019-2030)
        7.3.4 Canada Market Size and Forecast (2019-2030)
        7.3.5 Mexico Market Size and Forecast (2019-2030)

8 Europe
    8.1 Europe EUV Mask Defect Inspection Equipment Sales Quantity by Type (2019-2030)
    8.2 Europe EUV Mask Defect Inspection Equipment Sales Quantity by Application (2019-2030)
    8.3 Europe EUV Mask Defect Inspection Equipment Market Size by Country
        8.3.1 Europe EUV Mask Defect Inspection Equipment Sales Quantity by Country (2019-2030)
        8.3.2 Europe EUV Mask Defect Inspection Equipment Consumption Value by Country (2019-2030)
        8.3.3 Germany Market Size and Forecast (2019-2030)
        8.3.4 France Market Size and Forecast (2019-2030)
        8.3.5 United Kingdom Market Size and Forecast (2019-2030)
        8.3.6 Russia Market Size and Forecast (2019-2030)
        8.3.7 Italy Market Size and Forecast (2019-2030)

9 Asia-Pacific
    9.1 Asia-Pacific EUV Mask Defect Inspection Equipment Sales Quantity by Type (2019-2030)
    9.2 Asia-Pacific EUV Mask Defect Inspection Equipment Sales Quantity by Application (2019-2030)
    9.3 Asia-Pacific EUV Mask Defect Inspection Equipment Market Size by Region
        9.3.1 Asia-Pacific EUV Mask Defect Inspection Equipment Sales Quantity by Region (2019-2030)
        9.3.2 Asia-Pacific EUV Mask Defect Inspection Equipment Consumption Value by Region (2019-2030)
        9.3.3 China Market Size and Forecast (2019-2030)
        9.3.4 Japan Market Size and Forecast (2019-2030)
        9.3.5 South Korea Market Size and Forecast (2019-2030)
        9.3.6 India Market Size and Forecast (2019-2030)
        9.3.7 Southeast Asia Market Size and Forecast (2019-2030)
        9.3.8 Australia Market Size and Forecast (2019-2030)

10 South America
    10.1 South America EUV Mask Defect Inspection Equipment Sales Quantity by Type (2019-2030)
    10.2 South America EUV Mask Defect Inspection Equipment Sales Quantity by Application (2019-2030)
    10.3 South America EUV Mask Defect Inspection Equipment Market Size by Country
        10.3.1 South America EUV Mask Defect Inspection Equipment Sales Quantity by Country (2019-2030)
        10.3.2 South America EUV Mask Defect Inspection Equipment Consumption Value by Country (2019-2030)
        10.3.3 Brazil Market Size and Forecast (2019-2030)
        10.3.4 Argentina Market Size and Forecast (2019-2030)

11 Middle East & Africa
    11.1 Middle East & Africa EUV Mask Defect Inspection Equipment Sales Quantity by Type (2019-2030)
    11.2 Middle East & Africa EUV Mask Defect Inspection Equipment Sales Quantity by Application (2019-2030)
    11.3 Middle East & Africa EUV Mask Defect Inspection Equipment Market Size by Country
        11.3.1 Middle East & Africa EUV Mask Defect Inspection Equipment Sales Quantity by Country (2019-2030)
        11.3.2 Middle East & Africa EUV Mask Defect Inspection Equipment Consumption Value by Country (2019-2030)
        11.3.3 Turkey Market Size and Forecast (2019-2030)
        11.3.4 Egypt Market Size and Forecast (2019-2030)
        11.3.5 Saudi Arabia Market Size and Forecast (2019-2030)
        11.3.6 South Africa Market Size and Forecast (2019-2030)

12 Market Dynamics
    12.1 EUV Mask Defect Inspection Equipment Market Drivers
    12.2 EUV Mask Defect Inspection Equipment Market Restraints
    12.3 EUV Mask Defect Inspection Equipment Trends Analysis
    12.4 Porters Five Forces Analysis
        12.4.1 Threat of New Entrants
        12.4.2 Bargaining Power of Suppliers
        12.4.3 Bargaining Power of Buyers
        12.4.4 Threat of Substitutes
        12.4.5 Competitive Rivalry

13 Raw Material and Industry Chain
    13.1 Raw Material of EUV Mask Defect Inspection Equipment and Key Manufacturers
    13.2 Manufacturing Costs Percentage of EUV Mask Defect Inspection Equipment
    13.3 EUV Mask Defect Inspection Equipment Production Process
    13.4 Industry Value Chain Analysis

14 Shipments by Distribution Channel
    14.1 Sales Channel
        14.1.1 Direct to End-User
        14.1.2 Distributors
    14.2 EUV Mask Defect Inspection Equipment Typical Distributors
    14.3 EUV Mask Defect Inspection Equipment Typical Customers

15 Research Findings and Conclusion

16 Appendix
    16.1 Methodology
    16.2 Research Process and Data Source
    16.3 Disclaimer

Table of Figures

List of Tables
 Table 1. Global EUV Mask Defect Inspection Equipment Consumption Value by Type, (USD Million), 2019 & 2023 & 2030
 Table 2. Global EUV Mask Defect Inspection Equipment Consumption Value by Application, (USD Million), 2019 & 2023 & 2030
 Table 3. Lasertec Basic Information, Manufacturing Base and Competitors
 Table 4. Lasertec Major Business
 Table 5. Lasertec EUV Mask Defect Inspection Equipment Product and Services
 Table 6. Lasertec EUV Mask Defect Inspection Equipment Sales Quantity (Units), Average Price (USD/Unit), Revenue (USD Million), Gross Margin and Market Share (2019-2024)
 Table 7. Lasertec Recent Developments/Updates
 Table 8. KLA-Tencor Basic Information, Manufacturing Base and Competitors
 Table 9. KLA-Tencor Major Business
 Table 10. KLA-Tencor EUV Mask Defect Inspection Equipment Product and Services
 Table 11. KLA-Tencor EUV Mask Defect Inspection Equipment Sales Quantity (Units), Average Price (USD/Unit), Revenue (USD Million), Gross Margin and Market Share (2019-2024)
 Table 12. KLA-Tencor Recent Developments/Updates
 Table 13. Advantest Basic Information, Manufacturing Base and Competitors
 Table 14. Advantest Major Business
 Table 15. Advantest EUV Mask Defect Inspection Equipment Product and Services
 Table 16. Advantest EUV Mask Defect Inspection Equipment Sales Quantity (Units), Average Price (USD/Unit), Revenue (USD Million), Gross Margin and Market Share (2019-2024)
 Table 17. Advantest Recent Developments/Updates
 Table 18. Global EUV Mask Defect Inspection Equipment Sales Quantity by Manufacturer (2019-2024) & (Units)
 Table 19. Global EUV Mask Defect Inspection Equipment Revenue by Manufacturer (2019-2024) & (USD Million)
 Table 20. Global EUV Mask Defect Inspection Equipment Average Price by Manufacturer (2019-2024) & (USD/Unit)
 Table 21. Market Position of Manufacturers in EUV Mask Defect Inspection Equipment, (Tier 1, Tier 2, and Tier 3), Based on Revenue in 2023
 Table 22. Head Office and EUV Mask Defect Inspection Equipment Production Site of Key Manufacturer
 Table 23. EUV Mask Defect Inspection Equipment Market: Company Product Type Footprint
 Table 24. EUV Mask Defect Inspection Equipment Market: Company Product Application Footprint
 Table 25. EUV Mask Defect Inspection Equipment New Market Entrants and Barriers to Market Entry
 Table 26. EUV Mask Defect Inspection Equipment Mergers, Acquisition, Agreements, and Collaborations
 Table 27. Global EUV Mask Defect Inspection Equipment Consumption Value by Region (2019-2023-2030) & (USD Million) & CAGR
 Table 28. Global EUV Mask Defect Inspection Equipment Sales Quantity by Region (2019-2024) & (Units)
 Table 29. Global EUV Mask Defect Inspection Equipment Sales Quantity by Region (2025-2030) & (Units)
 Table 30. Global EUV Mask Defect Inspection Equipment Consumption Value by Region (2019-2024) & (USD Million)
 Table 31. Global EUV Mask Defect Inspection Equipment Consumption Value by Region (2025-2030) & (USD Million)
 Table 32. Global EUV Mask Defect Inspection Equipment Average Price by Region (2019-2024) & (USD/Unit)
 Table 33. Global EUV Mask Defect Inspection Equipment Average Price by Region (2025-2030) & (USD/Unit)
 Table 34. Global EUV Mask Defect Inspection Equipment Sales Quantity by Type (2019-2024) & (Units)
 Table 35. Global EUV Mask Defect Inspection Equipment Sales Quantity by Type (2025-2030) & (Units)
 Table 36. Global EUV Mask Defect Inspection Equipment Consumption Value by Type (2019-2024) & (USD Million)
 Table 37. Global EUV Mask Defect Inspection Equipment Consumption Value by Type (2025-2030) & (USD Million)
 Table 38. Global EUV Mask Defect Inspection Equipment Average Price by Type (2019-2024) & (USD/Unit)
 Table 39. Global EUV Mask Defect Inspection Equipment Average Price by Type (2025-2030) & (USD/Unit)
 Table 40. Global EUV Mask Defect Inspection Equipment Sales Quantity by Application (2019-2024) & (Units)
 Table 41. Global EUV Mask Defect Inspection Equipment Sales Quantity by Application (2025-2030) & (Units)
 Table 42. Global EUV Mask Defect Inspection Equipment Consumption Value by Application (2019-2024) & (USD Million)
 Table 43. Global EUV Mask Defect Inspection Equipment Consumption Value by Application (2025-2030) & (USD Million)
 Table 44. Global EUV Mask Defect Inspection Equipment Average Price by Application (2019-2024) & (USD/Unit)
 Table 45. Global EUV Mask Defect Inspection Equipment Average Price by Application (2025-2030) & (USD/Unit)
 Table 46. North America EUV Mask Defect Inspection Equipment Sales Quantity by Type (2019-2024) & (Units)
 Table 47. North America EUV Mask Defect Inspection Equipment Sales Quantity by Type (2025-2030) & (Units)
 Table 48. North America EUV Mask Defect Inspection Equipment Sales Quantity by Application (2019-2024) & (Units)
 Table 49. North America EUV Mask Defect Inspection Equipment Sales Quantity by Application (2025-2030) & (Units)
 Table 50. North America EUV Mask Defect Inspection Equipment Sales Quantity by Country (2019-2024) & (Units)
 Table 51. North America EUV Mask Defect Inspection Equipment Sales Quantity by Country (2025-2030) & (Units)
 Table 52. North America EUV Mask Defect Inspection Equipment Consumption Value by Country (2019-2024) & (USD Million)
 Table 53. North America EUV Mask Defect Inspection Equipment Consumption Value by Country (2025-2030) & (USD Million)
 Table 54. Europe EUV Mask Defect Inspection Equipment Sales Quantity by Type (2019-2024) & (Units)
 Table 55. Europe EUV Mask Defect Inspection Equipment Sales Quantity by Type (2025-2030) & (Units)
 Table 56. Europe EUV Mask Defect Inspection Equipment Sales Quantity by Application (2019-2024) & (Units)
 Table 57. Europe EUV Mask Defect Inspection Equipment Sales Quantity by Application (2025-2030) & (Units)
 Table 58. Europe EUV Mask Defect Inspection Equipment Sales Quantity by Country (2019-2024) & (Units)
 Table 59. Europe EUV Mask Defect Inspection Equipment Sales Quantity by Country (2025-2030) & (Units)
 Table 60. Europe EUV Mask Defect Inspection Equipment Consumption Value by Country (2019-2024) & (USD Million)
 Table 61. Europe EUV Mask Defect Inspection Equipment Consumption Value by Country (2025-2030) & (USD Million)
 Table 62. Asia-Pacific EUV Mask Defect Inspection Equipment Sales Quantity by Type (2019-2024) & (Units)
 Table 63. Asia-Pacific EUV Mask Defect Inspection Equipment Sales Quantity by Type (2025-2030) & (Units)
 Table 64. Asia-Pacific EUV Mask Defect Inspection Equipment Sales Quantity by Application (2019-2024) & (Units)
 Table 65. Asia-Pacific EUV Mask Defect Inspection Equipment Sales Quantity by Application (2025-2030) & (Units)
 Table 66. Asia-Pacific EUV Mask Defect Inspection Equipment Sales Quantity by Region (2019-2024) & (Units)
 Table 67. Asia-Pacific EUV Mask Defect Inspection Equipment Sales Quantity by Region (2025-2030) & (Units)
 Table 68. Asia-Pacific EUV Mask Defect Inspection Equipment Consumption Value by Region (2019-2024) & (USD Million)
 Table 69. Asia-Pacific EUV Mask Defect Inspection Equipment Consumption Value by Region (2025-2030) & (USD Million)
 Table 70. South America EUV Mask Defect Inspection Equipment Sales Quantity by Type (2019-2024) & (Units)
 Table 71. South America EUV Mask Defect Inspection Equipment Sales Quantity by Type (2025-2030) & (Units)
 Table 72. South America EUV Mask Defect Inspection Equipment Sales Quantity by Application (2019-2024) & (Units)
 Table 73. South America EUV Mask Defect Inspection Equipment Sales Quantity by Application (2025-2030) & (Units)
 Table 74. South America EUV Mask Defect Inspection Equipment Sales Quantity by Country (2019-2024) & (Units)
 Table 75. South America EUV Mask Defect Inspection Equipment Sales Quantity by Country (2025-2030) & (Units)
 Table 76. South America EUV Mask Defect Inspection Equipment Consumption Value by Country (2019-2024) & (USD Million)
 Table 77. South America EUV Mask Defect Inspection Equipment Consumption Value by Country (2025-2030) & (USD Million)
 Table 78. Middle East & Africa EUV Mask Defect Inspection Equipment Sales Quantity by Type (2019-2024) & (Units)
 Table 79. Middle East & Africa EUV Mask Defect Inspection Equipment Sales Quantity by Type (2025-2030) & (Units)
 Table 80. Middle East & Africa EUV Mask Defect Inspection Equipment Sales Quantity by Application (2019-2024) & (Units)
 Table 81. Middle East & Africa EUV Mask Defect Inspection Equipment Sales Quantity by Application (2025-2030) & (Units)
 Table 82. Middle East & Africa EUV Mask Defect Inspection Equipment Sales Quantity by Country (2019-2024) & (Units)
 Table 83. Middle East & Africa EUV Mask Defect Inspection Equipment Sales Quantity by Country (2025-2030) & (Units)
 Table 84. Middle East & Africa EUV Mask Defect Inspection Equipment Consumption Value by Country (2019-2024) & (USD Million)
 Table 85. Middle East & Africa EUV Mask Defect Inspection Equipment Consumption Value by Country (2025-2030) & (USD Million)
 Table 86. EUV Mask Defect Inspection Equipment Raw Material
 Table 87. Key Manufacturers of EUV Mask Defect Inspection Equipment Raw Materials
 Table 88. EUV Mask Defect Inspection Equipment Typical Distributors
 Table 89. EUV Mask Defect Inspection Equipment Typical Customers


List of Figures
 Figure 1. EUV Mask Defect Inspection Equipment Picture
 Figure 2. Global EUV Mask Defect Inspection Equipment Revenue by Type, (USD Million), 2019 & 2023 & 2030
 Figure 3. Global EUV Mask Defect Inspection Equipment Revenue Market Share by Type in 2023
 Figure 4. 5-7nm Process Examples
 Figure 5. 3nm and Below Process Examples
 Figure 6. Global EUV Mask Defect Inspection Equipment Consumption Value by Application, (USD Million), 2019 & 2023 & 2030
 Figure 7. Global EUV Mask Defect Inspection Equipment Revenue Market Share by Application in 2023
 Figure 8. Mask Shop Examples
 Figure 9. Fab Examples
 Figure 10. Global EUV Mask Defect Inspection Equipment Consumption Value, (USD Million): 2019 & 2023 & 2030
 Figure 11. Global EUV Mask Defect Inspection Equipment Consumption Value and Forecast (2019-2030) & (USD Million)
 Figure 12. Global EUV Mask Defect Inspection Equipment Sales Quantity (2019-2030) & (Units)
 Figure 13. Global EUV Mask Defect Inspection Equipment Price (2019-2030) & (USD/Unit)
 Figure 14. Global EUV Mask Defect Inspection Equipment Sales Quantity Market Share by Manufacturer in 2023
 Figure 15. Global EUV Mask Defect Inspection Equipment Revenue Market Share by Manufacturer in 2023
 Figure 16. Producer Shipments of EUV Mask Defect Inspection Equipment by Manufacturer Sales ($MM) and Market Share (%): 2023
 Figure 17. Top 3 EUV Mask Defect Inspection Equipment Manufacturer (Revenue) Market Share in 2023
 Figure 18. Top 6 EUV Mask Defect Inspection Equipment Manufacturer (Revenue) Market Share in 2023
 Figure 19. Global EUV Mask Defect Inspection Equipment Sales Quantity Market Share by Region (2019-2030)
 Figure 20. Global EUV Mask Defect Inspection Equipment Consumption Value Market Share by Region (2019-2030)
 Figure 21. North America EUV Mask Defect Inspection Equipment Consumption Value (2019-2030) & (USD Million)
 Figure 22. Europe EUV Mask Defect Inspection Equipment Consumption Value (2019-2030) & (USD Million)
 Figure 23. Asia-Pacific EUV Mask Defect Inspection Equipment Consumption Value (2019-2030) & (USD Million)
 Figure 24. South America EUV Mask Defect Inspection Equipment Consumption Value (2019-2030) & (USD Million)
 Figure 25. Middle East & Africa EUV Mask Defect Inspection Equipment Consumption Value (2019-2030) & (USD Million)
 Figure 26. Global EUV Mask Defect Inspection Equipment Sales Quantity Market Share by Type (2019-2030)
 Figure 27. Global EUV Mask Defect Inspection Equipment Consumption Value Market Share by Type (2019-2030)
 Figure 28. Global EUV Mask Defect Inspection Equipment Average Price by Type (2019-2030) & (USD/Unit)
 Figure 29. Global EUV Mask Defect Inspection Equipment Sales Quantity Market Share by Application (2019-2030)
 Figure 30. Global EUV Mask Defect Inspection Equipment Revenue Market Share by Application (2019-2030)
 Figure 31. Global EUV Mask Defect Inspection Equipment Average Price by Application (2019-2030) & (USD/Unit)
 Figure 32. North America EUV Mask Defect Inspection Equipment Sales Quantity Market Share by Type (2019-2030)
 Figure 33. North America EUV Mask Defect Inspection Equipment Sales Quantity Market Share by Application (2019-2030)
 Figure 34. North America EUV Mask Defect Inspection Equipment Sales Quantity Market Share by Country (2019-2030)
 Figure 35. North America EUV Mask Defect Inspection Equipment Consumption Value Market Share by Country (2019-2030)
 Figure 36. United States EUV Mask Defect Inspection Equipment Consumption Value (2019-2030) & (USD Million)
 Figure 37. Canada EUV Mask Defect Inspection Equipment Consumption Value (2019-2030) & (USD Million)
 Figure 38. Mexico EUV Mask Defect Inspection Equipment Consumption Value (2019-2030) & (USD Million)
 Figure 39. Europe EUV Mask Defect Inspection Equipment Sales Quantity Market Share by Type (2019-2030)
 Figure 40. Europe EUV Mask Defect Inspection Equipment Sales Quantity Market Share by Application (2019-2030)
 Figure 41. Europe EUV Mask Defect Inspection Equipment Sales Quantity Market Share by Country (2019-2030)
 Figure 42. Europe EUV Mask Defect Inspection Equipment Consumption Value Market Share by Country (2019-2030)
 Figure 43. Germany EUV Mask Defect Inspection Equipment Consumption Value (2019-2030) & (USD Million)
 Figure 44. France EUV Mask Defect Inspection Equipment Consumption Value (2019-2030) & (USD Million)
 Figure 45. United Kingdom EUV Mask Defect Inspection Equipment Consumption Value (2019-2030) & (USD Million)
 Figure 46. Russia EUV Mask Defect Inspection Equipment Consumption Value (2019-2030) & (USD Million)
 Figure 47. Italy EUV Mask Defect Inspection Equipment Consumption Value (2019-2030) & (USD Million)
 Figure 48. Asia-Pacific EUV Mask Defect Inspection Equipment Sales Quantity Market Share by Type (2019-2030)
 Figure 49. Asia-Pacific EUV Mask Defect Inspection Equipment Sales Quantity Market Share by Application (2019-2030)
 Figure 50. Asia-Pacific EUV Mask Defect Inspection Equipment Sales Quantity Market Share by Region (2019-2030)
 Figure 51. Asia-Pacific EUV Mask Defect Inspection Equipment Consumption Value Market Share by Region (2019-2030)
 Figure 52. China EUV Mask Defect Inspection Equipment Consumption Value (2019-2030) & (USD Million)
 Figure 53. Japan EUV Mask Defect Inspection Equipment Consumption Value (2019-2030) & (USD Million)
 Figure 54. South Korea EUV Mask Defect Inspection Equipment Consumption Value (2019-2030) & (USD Million)
 Figure 55. India EUV Mask Defect Inspection Equipment Consumption Value (2019-2030) & (USD Million)
 Figure 56. Southeast Asia EUV Mask Defect Inspection Equipment Consumption Value (2019-2030) & (USD Million)
 Figure 57. Australia EUV Mask Defect Inspection Equipment Consumption Value (2019-2030) & (USD Million)
 Figure 58. South America EUV Mask Defect Inspection Equipment Sales Quantity Market Share by Type (2019-2030)
 Figure 59. South America EUV Mask Defect Inspection Equipment Sales Quantity Market Share by Application (2019-2030)
 Figure 60. South America EUV Mask Defect Inspection Equipment Sales Quantity Market Share by Country (2019-2030)
 Figure 61. South America EUV Mask Defect Inspection Equipment Consumption Value Market Share by Country (2019-2030)
 Figure 62. Brazil EUV Mask Defect Inspection Equipment Consumption Value (2019-2030) & (USD Million)
 Figure 63. Argentina EUV Mask Defect Inspection Equipment Consumption Value (2019-2030) & (USD Million)
 Figure 64. Middle East & Africa EUV Mask Defect Inspection Equipment Sales Quantity Market Share by Type (2019-2030)
 Figure 65. Middle East & Africa EUV Mask Defect Inspection Equipment Sales Quantity Market Share by Application (2019-2030)
 Figure 66. Middle East & Africa EUV Mask Defect Inspection Equipment Sales Quantity Market Share by Country (2019-2030)
 Figure 67. Middle East & Africa EUV Mask Defect Inspection Equipment Consumption Value Market Share by Country (2019-2030)
 Figure 68. Turkey EUV Mask Defect Inspection Equipment Consumption Value (2019-2030) & (USD Million)
 Figure 69. Egypt EUV Mask Defect Inspection Equipment Consumption Value (2019-2030) & (USD Million)
 Figure 70. Saudi Arabia EUV Mask Defect Inspection Equipment Consumption Value (2019-2030) & (USD Million)
 Figure 71. South Africa EUV Mask Defect Inspection Equipment Consumption Value (2019-2030) & (USD Million)
 Figure 72. EUV Mask Defect Inspection Equipment Market Drivers
 Figure 73. EUV Mask Defect Inspection Equipment Market Restraints
 Figure 74. EUV Mask Defect Inspection Equipment Market Trends
 Figure 75. Porters Five Forces Analysis
 Figure 76. Manufacturing Cost Structure Analysis of EUV Mask Defect Inspection Equipment in 2023
 Figure 77. Manufacturing Process Analysis of EUV Mask Defect Inspection Equipment
 Figure 78. EUV Mask Defect Inspection Equipment Industrial Chain
 Figure 79. Sales Channel: Direct to End-User vs Distributors
 Figure 80. Direct Channel Pros & Cons
 Figure 81. Indirect Channel Pros & Cons
 Figure 82. Methodology
 Figure 83. Research Process and Data Source

Companies Mentioned

Lasertec
KLA-Tencor
Advantest