Global EUV Mask Defect Inspection Equipment Supply, Demand and Key Producers, 2024-2030

Description

Mask, also known as Photomask or Reticle, is a graphic master used in the lithography process commonly used in microelectronics processing technology. As a carrier of graphic information, Mask transfers the graphic to the base material through the exposure process, thereby realizing the transfer of the graphic.

Mask defect detection is a key link in the semiconductor lithography process, which aims to check the Mask and identify and repair the defects on it. As a critical component in the lithography process, Mask is responsible for accurately transferring the circuit pattern to the wafer, and its quality is directly related to the accuracy of the wafer pattern and the performance of the final device. There are various types of defects, including particle contamination, pattern breakage, bridging problems, and defects in the mask material itself.

EUV Mask defect detection equipment is a special equipment that plays an important role in the high-end semiconductor process technology. Given the high precision required by EUV lithography technology, even the smallest defect on the Mask may significantly affect the quality of the circuit pattern on the wafer, and thus adversely affect the performance and yield of the chip. Therefore, the use of special detection equipment to strictly inspect the EUV Mask is an indispensable key link to ensure the quality of semiconductor manufacturing.

The global EUV Mask Defect Inspection Equipment market size is expected to reach $ 3496 million by 2030, rising at a market growth of 12.9% CAGR during the forecast period (2024-2030).

At present, optical detection is the mainstream in semiconductor detection technology. The types of semiconductor optical detection include pattern, non-pattern and mask detection. Among them, pattern defect detection is divided into bright field and dark field detection. Both are analyzed through optical signals. The difference is that the bright field is a vertically reflected light signal, while the dark field is a scattered light signal.

In the semiconductor lithography process, corresponding light sources need to be used for different masks. Different mask applications vary greatly, and can be generally divided into binary masks, phase-shift masks and EUV masks. EUV Mask is a new type of mask designed specifically for EUV (extreme ultraviolet) lithography technology. Given the extremely short wavelength of EUV and its easy absorption by a variety of materials, traditional refractive elements such as lenses cannot be used. Instead, according to the Bragg law, the reflection of the light beam is achieved through a multi-layer (ML) structure (unlike EUV, DUV uses transmitted light). This type of mask is widely used in 7nm, 5nm, 3nm and 2nm (TSMC plans to mass produce in 2025) high-end manufacturing processes.

At present, mask detection technology is mainly optical detection and SEM detection. Among them, the optical inspection companies are mainly Lasertec and KLA, while SEM inspection is Advantest. From the perspective of downstream applications, as long as the mask uses Pellicle, EUV Mask inspection equipment is required (in other words, as long as there is an EUV lithography machine, EUV inspection equipment must be used), but at present, not all EUV Masks of downstream terminal manufacturers will be used with Pellicle.

In DUV lithography or optical Mask technology, Pellicle plays a key role. The Mask inspection tool operates at an exposure wavelength of 193nm, and inspection is performed through this layer of film. For the wafer fab, this is a direct and efficient process. However, in extreme ultraviolet (EUV) lithography technology, the manufacturing process of the Mask needs to be carried out in a dedicated Mask workshop. At this point, the inspection of the Mask becomes more complicated because it requires a high-resolution system. In the wafer fab environment, the ideal situation is to use a layer of Pellicle to protect the Mask from particle contamination, while allowing the inspection system to work through this layer of Pellicle. If there are no defects, you can proceed; if defects are detected, you need to remove the pellicle and send the Mask to the Mask workshop for cleaning.

EUV Mask defect detection equipment is mainly used in Mask Shop and Fab. The Fab includes the mask production line and the wafer manufacturing production line. For the Fab, there are two main reasons for using EUV Mask defect detection equipment. First, once the pellicle is attached to the Mask, other types of equipment (such as electron beam or DUV equipment) except EUV detection equipment are difficult to achieve high-sensitivity detection effects. This is because the presence of pellicles interferes with the detection capabilities of these devices, making it difficult for them to accurately identify tiny defects. Secondly, EUV detection equipment has higher detection accuracy and can detect defects and particles that traditional DUV Mask detection methods cannot capture. Mask Shop has always had a relatively large share, reaching about 61% in 2023. However, with the acceleration of commercialization of smaller advanced process nodes, it is expected that the share of Fab will reach 42% by 2030.

At present, the EUV Mask defect detection equipment market is mainly monopolized by KLA and Lasertec. EUV Mask defect detection equipment is a high-precision and advanced equipment with a long delivery time. For example, Lasertec's delivery time is two years. In the next few years, the two leading companies will still maintain a monopoly in the EUV Mask defect detection market.

This report studies the global EUV Mask Defect Inspection Equipment production, demand, key manufacturers, and key regions.

This report is a detailed and comprehensive analysis of the world market for EUV Mask Defect Inspection Equipment and provides market size (US$ million) and Year-over-Year (YoY) Growth, considering 2023 as the base year. This report explores demand trends and competition, as well as details the characteristics of EUV Mask Defect Inspection Equipment that contribute to its increasing demand across many markets.

Highlights and key features of the study
Global EUV Mask Defect Inspection Equipment total production and demand, 2019-2030, (Units)
Global EUV Mask Defect Inspection Equipment total production value, 2019-2030, (USD Million)
Global EUV Mask Defect Inspection Equipment production by region & country, production, value, CAGR, 2019-2030, (USD Million) & (Units), (based on production site)
Global EUV Mask Defect Inspection Equipment consumption by region & country, CAGR, 2019-2030 & (Units)
U.S. VS China: EUV Mask Defect Inspection Equipment domestic production, consumption, key domestic manufacturers and share
Global EUV Mask Defect Inspection Equipment production by manufacturer, production, price, value and market share 2019-2024, (USD Million) & (Units)
Global EUV Mask Defect Inspection Equipment production by Type, production, value, CAGR, 2019-2030, (USD Million) & (Units)
Global EUV Mask Defect Inspection Equipment production by Application, production, value, CAGR, 2019-2030, (USD Million) & (Units)
This report profiles key players in the global EUV Mask Defect Inspection Equipment market based on the following parameters - company overview, production, value, price, gross margin, product portfolio, geographical presence, and key developments. Key companies covered as a part of this study include Lasertec, KLA-Tencor, Advantest, etc.

This report also provides key insights about market drivers, restraints, opportunities, new product launches or approvals.

Stakeholders would have ease in decision-making through various strategy matrices used in analyzing the World EUV Mask Defect Inspection Equipment market
Detailed Segmentation:
Each section contains quantitative market data including market by value (US$ Millions), volume (production, consumption) & (Units) and average price (USD/Unit) by manufacturer, by Type, and by Application. Data is given for the years 2019-2030 by year with 2023 as the base year, 2024 as the estimate year, and 2025-2030 as the forecast year.

Global EUV Mask Defect Inspection Equipment Market, By Region:
    United States
    China
    Europe
    Japan
    South Korea
    ASEAN
    India
    Rest of World

Global EUV Mask Defect Inspection Equipment Market, Segmentation by Type:
    5-7nm Process
    3nm and Below Process

Global EUV Mask Defect Inspection Equipment Market, Segmentation by Application:
    Mask Shop
    Fab

Companies Profiled:
    Lasertec
    KLA-Tencor
    Advantest

Key Questions Answered:
1. How big is the global EUV Mask Defect Inspection Equipment market?
2. What is the demand of the global EUV Mask Defect Inspection Equipment market?
3. What is the year over year growth of the global EUV Mask Defect Inspection Equipment market?
4. What is the production and production value of the global EUV Mask Defect Inspection Equipment market?
5. Who are the key producers in the global EUV Mask Defect Inspection Equipment market?
6. What are the growth factors driving the market demand?

Table of Contents

1 Supply Summary
    1.1 EUV Mask Defect Inspection Equipment Introduction
    1.2 World EUV Mask Defect Inspection Equipment Supply & Forecast
        1.2.1 World EUV Mask Defect Inspection Equipment Production Value (2019 & 2023 & 2030)
        1.2.2 World EUV Mask Defect Inspection Equipment Production (2019-2030)
        1.2.3 World EUV Mask Defect Inspection Equipment Pricing Trends (2019-2030)
    1.3 World EUV Mask Defect Inspection Equipment Production by Region (Based on Production Site)
        1.3.1 World EUV Mask Defect Inspection Equipment Production Value by Region (2019-2030)
        1.3.2 World EUV Mask Defect Inspection Equipment Production by Region (2019-2030)
        1.3.3 World EUV Mask Defect Inspection Equipment Average Price by Region (2019-2030)
        1.3.4 USA EUV Mask Defect Inspection Equipment Production (2019-2030)
        1.3.5 Japan EUV Mask Defect Inspection Equipment Production (2019-2030)
    1.4 Market Drivers, Restraints and Trends
        1.4.1 EUV Mask Defect Inspection Equipment Market Drivers
        1.4.2 Factors Affecting Demand
        1.4.3 EUV Mask Defect Inspection Equipment Major Market Trends

2 Demand Summary
    2.1 World EUV Mask Defect Inspection Equipment Demand (2019-2030)
    2.2 World EUV Mask Defect Inspection Equipment Consumption by Region
        2.2.1 World EUV Mask Defect Inspection Equipment Consumption by Region (2019-2024)
        2.2.2 World EUV Mask Defect Inspection Equipment Consumption Forecast by Region (2025-2030)
    2.3 United States EUV Mask Defect Inspection Equipment Consumption (2019-2030)
    2.4 China EUV Mask Defect Inspection Equipment Consumption (2019-2030)
    2.5 Europe EUV Mask Defect Inspection Equipment Consumption (2019-2030)
    2.6 Japan EUV Mask Defect Inspection Equipment Consumption (2019-2030)
    2.7 South Korea EUV Mask Defect Inspection Equipment Consumption (2019-2030)
    2.8 ASEAN EUV Mask Defect Inspection Equipment Consumption (2019-2030)
    2.9 India EUV Mask Defect Inspection Equipment Consumption (2019-2030)

3 World Manufacturers Competitive Analysis
    3.1 World EUV Mask Defect Inspection Equipment Production Value by Manufacturer (2019-2024)
    3.2 World EUV Mask Defect Inspection Equipment Production by Manufacturer (2019-2024)
    3.3 World EUV Mask Defect Inspection Equipment Average Price by Manufacturer (2019-2024)
    3.4 EUV Mask Defect Inspection Equipment Company Evaluation Quadrant
    3.5 Industry Rank and Concentration Rate (CR)
        3.5.1 Global EUV Mask Defect Inspection Equipment Industry Rank of Major Manufacturers
        3.5.2 Global Concentration Ratios (CR4) for EUV Mask Defect Inspection Equipment in 2023
        3.5.3 Global Concentration Ratios (CR8) for EUV Mask Defect Inspection Equipment in 2023
    3.6 EUV Mask Defect Inspection Equipment Market: Overall Company Footprint Analysis
        3.6.1 EUV Mask Defect Inspection Equipment Market: Region Footprint
        3.6.2 EUV Mask Defect Inspection Equipment Market: Company Product Type Footprint
        3.6.3 EUV Mask Defect Inspection Equipment Market: Company Product Application Footprint
    3.7 Competitive Environment
        3.7.1 Historical Structure of the Industry
        3.7.2 Barriers of Market Entry
        3.7.3 Factors of Competition
    3.8 New Entrant and Capacity Expansion Plans
    3.9 Mergers, Acquisition, Agreements, and Collaborations

4 United States VS China VS Rest of the World
    4.1 United States VS China: EUV Mask Defect Inspection Equipment Production Value Comparison
        4.1.1 United States VS China: EUV Mask Defect Inspection Equipment Production Value Comparison (2019 & 2023 & 2030)
        4.1.2 United States VS China: EUV Mask Defect Inspection Equipment Production Value Market Share Comparison (2019 & 2023 & 2030)
    4.2 United States VS China: EUV Mask Defect Inspection Equipment Production Comparison
        4.2.1 United States VS China: EUV Mask Defect Inspection Equipment Production Comparison (2019 & 2023 & 2030)
        4.2.2 United States VS China: EUV Mask Defect Inspection Equipment Production Market Share Comparison (2019 & 2023 & 2030)
    4.3 United States VS China: EUV Mask Defect Inspection Equipment Consumption Comparison
        4.3.1 United States VS China: EUV Mask Defect Inspection Equipment Consumption Comparison (2019 & 2023 & 2030)
        4.3.2 United States VS China: EUV Mask Defect Inspection Equipment Consumption Market Share Comparison (2019 & 2023 & 2030)
    4.4 United States Based EUV Mask Defect Inspection Equipment Manufacturers and Market Share, 2019-2024
        4.4.1 United States Based EUV Mask Defect Inspection Equipment Manufacturers, Headquarters and Production Site (States, Country)
        4.4.2 United States Based Manufacturers EUV Mask Defect Inspection Equipment Production Value (2019-2024)
        4.4.3 United States Based Manufacturers EUV Mask Defect Inspection Equipment Production (2019-2024)
    4.5 China Based EUV Mask Defect Inspection Equipment Manufacturers and Market Share
        4.5.1 China Based EUV Mask Defect Inspection Equipment Manufacturers, Headquarters and Production Site (Province, Country)
        4.5.2 China Based Manufacturers EUV Mask Defect Inspection Equipment Production Value (2019-2024)
        4.5.3 China Based Manufacturers EUV Mask Defect Inspection Equipment Production (2019-2024)
    4.6 Rest of World Based EUV Mask Defect Inspection Equipment Manufacturers and Market Share, 2019-2024
        4.6.1 Rest of World Based EUV Mask Defect Inspection Equipment Manufacturers, Headquarters and Production Site (State, Country)
        4.6.2 Rest of World Based Manufacturers EUV Mask Defect Inspection Equipment Production Value (2019-2024)
        4.6.3 Rest of World Based Manufacturers EUV Mask Defect Inspection Equipment Production (2019-2024)

5 Market Analysis by Type
    5.1 World EUV Mask Defect Inspection Equipment Market Size Overview by Type: 2019 VS 2023 VS 2030
    5.2 Segment Introduction by Type
        5.2.1 5-7nm Process
        5.2.2 3nm and Below Process
    5.3 Market Segment by Type
        5.3.1 World EUV Mask Defect Inspection Equipment Production by Type (2019-2030)
        5.3.2 World EUV Mask Defect Inspection Equipment Production Value by Type (2019-2030)
        5.3.3 World EUV Mask Defect Inspection Equipment Average Price by Type (2019-2030)

6 Market Analysis by Application
    6.1 World EUV Mask Defect Inspection Equipment Market Size Overview by Application: 2019 VS 2023 VS 2030
    6.2 Segment Introduction by Application
        6.2.1 Mask Shop
        6.2.2 Fab
    6.3 Market Segment by Application
        6.3.1 World EUV Mask Defect Inspection Equipment Production by Application (2019-2030)
        6.3.2 World EUV Mask Defect Inspection Equipment Production Value by Application (2019-2030)
        6.3.3 World EUV Mask Defect Inspection Equipment Average Price by Application (2019-2030)

7 Company Profiles
    7.1 Lasertec
        7.1.1 Lasertec Details
        7.1.2 Lasertec Major Business
        7.1.3 Lasertec EUV Mask Defect Inspection Equipment Product and Services
        7.1.4 Lasertec EUV Mask Defect Inspection Equipment Production, Price, Value, Gross Margin and Market Share (2019-2024)
        7.1.5 Lasertec Recent Developments/Updates
        7.1.6 Lasertec Competitive Strengths & Weaknesses
    7.2 KLA-Tencor
        7.2.1 KLA-Tencor Details
        7.2.2 KLA-Tencor Major Business
        7.2.3 KLA-Tencor EUV Mask Defect Inspection Equipment Product and Services
        7.2.4 KLA-Tencor EUV Mask Defect Inspection Equipment Production, Price, Value, Gross Margin and Market Share (2019-2024)
        7.2.5 KLA-Tencor Recent Developments/Updates
        7.2.6 KLA-Tencor Competitive Strengths & Weaknesses
    7.3 Advantest
        7.3.1 Advantest Details
        7.3.2 Advantest Major Business
        7.3.3 Advantest EUV Mask Defect Inspection Equipment Product and Services
        7.3.4 Advantest EUV Mask Defect Inspection Equipment Production, Price, Value, Gross Margin and Market Share (2019-2024)
        7.3.5 Advantest Recent Developments/Updates
        7.3.6 Advantest Competitive Strengths & Weaknesses

8 Industry Chain Analysis
    8.1 EUV Mask Defect Inspection Equipment Industry Chain
    8.2 EUV Mask Defect Inspection Equipment Upstream Analysis
        8.2.1 EUV Mask Defect Inspection Equipment Core Raw Materials
        8.2.2 Main Manufacturers of EUV Mask Defect Inspection Equipment Core Raw Materials
    8.3 Midstream Analysis
    8.4 Downstream Analysis
    8.5 EUV Mask Defect Inspection Equipment Production Mode
    8.6 EUV Mask Defect Inspection Equipment Procurement Model
    8.7 EUV Mask Defect Inspection Equipment Industry Sales Model and Sales Channels
        8.7.1 EUV Mask Defect Inspection Equipment Sales Model
        8.7.2 EUV Mask Defect Inspection Equipment Typical Distributors

9 Research Findings and Conclusion

10 Appendix
    10.1 Methodology
    10.2 Research Process and Data Source
    10.3 Disclaimer

Table of Figures

List of Tables
 Table 1. World EUV Mask Defect Inspection Equipment Production Value by Region (2019, 2023 and 2030) & (USD Million)
 Table 2. World EUV Mask Defect Inspection Equipment Production Value by Region (2019-2024) & (USD Million)
 Table 3. World EUV Mask Defect Inspection Equipment Production Value by Region (2025-2030) & (USD Million)
 Table 4. World EUV Mask Defect Inspection Equipment Production Value Market Share by Region (2019-2024)
 Table 5. World EUV Mask Defect Inspection Equipment Production Value Market Share by Region (2025-2030)
 Table 6. World EUV Mask Defect Inspection Equipment Production by Region (2019-2024) & (Units)
 Table 7. World EUV Mask Defect Inspection Equipment Production by Region (2025-2030) & (Units)
 Table 8. World EUV Mask Defect Inspection Equipment Production Market Share by Region (2019-2024)
 Table 9. World EUV Mask Defect Inspection Equipment Production Market Share by Region (2025-2030)
 Table 10. World EUV Mask Defect Inspection Equipment Average Price by Region (2019-2024) & (USD/Unit)
 Table 11. World EUV Mask Defect Inspection Equipment Average Price by Region (2025-2030) & (USD/Unit)
 Table 12. EUV Mask Defect Inspection Equipment Major Market Trends
 Table 13. World EUV Mask Defect Inspection Equipment Consumption Growth Rate Forecast by Region (2019 & 2023 & 2030) & (Units)
 Table 14. World EUV Mask Defect Inspection Equipment Consumption by Region (2019-2024) & (Units)
 Table 15. World EUV Mask Defect Inspection Equipment Consumption Forecast by Region (2025-2030) & (Units)
 Table 16. World EUV Mask Defect Inspection Equipment Production Value by Manufacturer (2019-2024) & (USD Million)
 Table 17. Production Value Market Share of Key EUV Mask Defect Inspection Equipment Producers in 2023
 Table 18. World EUV Mask Defect Inspection Equipment Production by Manufacturer (2019-2024) & (Units)
 Table 19. Production Market Share of Key EUV Mask Defect Inspection Equipment Producers in 2023
 Table 20. World EUV Mask Defect Inspection Equipment Average Price by Manufacturer (2019-2024) & (USD/Unit)
 Table 21. Global EUV Mask Defect Inspection Equipment Company Evaluation Quadrant
 Table 22. World EUV Mask Defect Inspection Equipment Industry Rank of Major Manufacturers, Based on Production Value in 2023
 Table 23. Head Office and EUV Mask Defect Inspection Equipment Production Site of Key Manufacturer
 Table 24. EUV Mask Defect Inspection Equipment Market: Company Product Type Footprint
 Table 25. EUV Mask Defect Inspection Equipment Market: Company Product Application Footprint
 Table 26. EUV Mask Defect Inspection Equipment Competitive Factors
 Table 27. EUV Mask Defect Inspection Equipment New Entrant and Capacity Expansion Plans
 Table 28. EUV Mask Defect Inspection Equipment Mergers & Acquisitions Activity
 Table 29. United States VS China EUV Mask Defect Inspection Equipment Production Value Comparison, (2019 & 2023 & 2030) & (USD Million)
 Table 30. United States VS China EUV Mask Defect Inspection Equipment Production Comparison, (2019 & 2023 & 2030) & (Units)
 Table 31. United States VS China EUV Mask Defect Inspection Equipment Consumption Comparison, (2019 & 2023 & 2030) & (Units)
 Table 32. United States Based EUV Mask Defect Inspection Equipment Manufacturers, Headquarters and Production Site (States, Country)
 Table 33. United States Based Manufacturers EUV Mask Defect Inspection Equipment Production Value, (2019-2024) & (USD Million)
 Table 34. United States Based Manufacturers EUV Mask Defect Inspection Equipment Production Value Market Share (2019-2024)
 Table 35. United States Based Manufacturers EUV Mask Defect Inspection Equipment Production (2019-2024) & (Units)
 Table 36. United States Based Manufacturers EUV Mask Defect Inspection Equipment Production Market Share (2019-2024)
 Table 37. China Based EUV Mask Defect Inspection Equipment Manufacturers, Headquarters and Production Site (Province, Country)
 Table 38. China Based Manufacturers EUV Mask Defect Inspection Equipment Production Value, (2019-2024) & (USD Million)
 Table 39. China Based Manufacturers EUV Mask Defect Inspection Equipment Production Value Market Share (2019-2024)
 Table 40. China Based Manufacturers EUV Mask Defect Inspection Equipment Production, (2019-2024) & (Units)
 Table 41. China Based Manufacturers EUV Mask Defect Inspection Equipment Production Market Share (2019-2024)
 Table 42. Rest of World Based EUV Mask Defect Inspection Equipment Manufacturers, Headquarters and Production Site (State, Country)
 Table 43. Rest of World Based Manufacturers EUV Mask Defect Inspection Equipment Production Value, (2019-2024) & (USD Million)
 Table 44. Rest of World Based Manufacturers EUV Mask Defect Inspection Equipment Production Value Market Share (2019-2024)
 Table 45. Rest of World Based Manufacturers EUV Mask Defect Inspection Equipment Production, (2019-2024) & (Units)
 Table 46. Rest of World Based Manufacturers EUV Mask Defect Inspection Equipment Production Market Share (2019-2024)
 Table 47. World EUV Mask Defect Inspection Equipment Production Value by Type, (USD Million), 2019 & 2023 & 2030
 Table 48. World EUV Mask Defect Inspection Equipment Production by Type (2019-2024) & (Units)
 Table 49. World EUV Mask Defect Inspection Equipment Production by Type (2025-2030) & (Units)
 Table 50. World EUV Mask Defect Inspection Equipment Production Value by Type (2019-2024) & (USD Million)
 Table 51. World EUV Mask Defect Inspection Equipment Production Value by Type (2025-2030) & (USD Million)
 Table 52. World EUV Mask Defect Inspection Equipment Average Price by Type (2019-2024) & (USD/Unit)
 Table 53. World EUV Mask Defect Inspection Equipment Average Price by Type (2025-2030) & (USD/Unit)
 Table 54. World EUV Mask Defect Inspection Equipment Production Value by Application, (USD Million), 2019 & 2023 & 2030
 Table 55. World EUV Mask Defect Inspection Equipment Production by Application (2019-2024) & (Units)
 Table 56. World EUV Mask Defect Inspection Equipment Production by Application (2025-2030) & (Units)
 Table 57. World EUV Mask Defect Inspection Equipment Production Value by Application (2019-2024) & (USD Million)
 Table 58. World EUV Mask Defect Inspection Equipment Production Value by Application (2025-2030) & (USD Million)
 Table 59. World EUV Mask Defect Inspection Equipment Average Price by Application (2019-2024) & (USD/Unit)
 Table 60. World EUV Mask Defect Inspection Equipment Average Price by Application (2025-2030) & (USD/Unit)
 Table 61. Lasertec Basic Information, Manufacturing Base and Competitors
 Table 62. Lasertec Major Business
 Table 63. Lasertec EUV Mask Defect Inspection Equipment Product and Services
 Table 64. Lasertec EUV Mask Defect Inspection Equipment Production (Units), Price (USD/Unit), Production Value (USD Million), Gross Margin and Market Share (2019-2024)
 Table 65. Lasertec Recent Developments/Updates
 Table 66. Lasertec Competitive Strengths & Weaknesses
 Table 67. KLA-Tencor Basic Information, Manufacturing Base and Competitors
 Table 68. KLA-Tencor Major Business
 Table 69. KLA-Tencor EUV Mask Defect Inspection Equipment Product and Services
 Table 70. KLA-Tencor EUV Mask Defect Inspection Equipment Production (Units), Price (USD/Unit), Production Value (USD Million), Gross Margin and Market Share (2019-2024)
 Table 71. KLA-Tencor Recent Developments/Updates
 Table 72. KLA-Tencor Competitive Strengths & Weaknesses
 Table 73. Advantest Basic Information, Manufacturing Base and Competitors
 Table 74. Advantest Major Business
 Table 75. Advantest EUV Mask Defect Inspection Equipment Product and Services
 Table 76. Advantest EUV Mask Defect Inspection Equipment Production (Units), Price (USD/Unit), Production Value (USD Million), Gross Margin and Market Share (2019-2024)
 Table 77. Advantest Recent Developments/Updates
 Table 78. Advantest Competitive Strengths & Weaknesses
 Table 79. Global Key Players of EUV Mask Defect Inspection Equipment Upstream (Raw Materials)
 Table 80. Global EUV Mask Defect Inspection Equipment Typical Customers
 Table 81. EUV Mask Defect Inspection Equipment Typical Distributors


List of Figures
 Figure 1. EUV Mask Defect Inspection Equipment Picture
 Figure 2. World EUV Mask Defect Inspection Equipment Production Value: 2019 & 2023 & 2030, (USD Million)
 Figure 3. World EUV Mask Defect Inspection Equipment Production Value and Forecast (2019-2030) & (USD Million)
 Figure 4. World EUV Mask Defect Inspection Equipment Production (2019-2030) & (Units)
 Figure 5. World EUV Mask Defect Inspection Equipment Average Price (2019-2030) & (USD/Unit)
 Figure 6. World EUV Mask Defect Inspection Equipment Production Value Market Share by Region (2019-2030)
 Figure 7. World EUV Mask Defect Inspection Equipment Production Market Share by Region (2019-2030)
 Figure 8. USA EUV Mask Defect Inspection Equipment Production (2019-2030) & (Units)
 Figure 9. Japan EUV Mask Defect Inspection Equipment Production (2019-2030) & (Units)
 Figure 10. EUV Mask Defect Inspection Equipment Market Drivers
 Figure 11. Factors Affecting Demand
 Figure 12. World EUV Mask Defect Inspection Equipment Consumption (2019-2030) & (Units)
 Figure 13. World EUV Mask Defect Inspection Equipment Consumption Market Share by Region (2019-2030)
 Figure 14. United States EUV Mask Defect Inspection Equipment Consumption (2019-2030) & (Units)
 Figure 15. China EUV Mask Defect Inspection Equipment Consumption (2019-2030) & (Units)
 Figure 16. Europe EUV Mask Defect Inspection Equipment Consumption (2019-2030) & (Units)
 Figure 17. Japan EUV Mask Defect Inspection Equipment Consumption (2019-2030) & (Units)
 Figure 18. South Korea EUV Mask Defect Inspection Equipment Consumption (2019-2030) & (Units)
 Figure 19. ASEAN EUV Mask Defect Inspection Equipment Consumption (2019-2030) & (Units)
 Figure 20. India EUV Mask Defect Inspection Equipment Consumption (2019-2030) & (Units)
 Figure 21. Producer Shipments of EUV Mask Defect Inspection Equipment by Manufacturer Revenue ($MM) and Market Share (%): 2023
 Figure 22. Global Four-firm Concentration Ratios (CR4) for EUV Mask Defect Inspection Equipment Markets in 2023
 Figure 23. Global Four-firm Concentration Ratios (CR8) for EUV Mask Defect Inspection Equipment Markets in 2023
 Figure 24. United States VS China: EUV Mask Defect Inspection Equipment Production Value Market Share Comparison (2019 & 2023 & 2030)
 Figure 25. United States VS China: EUV Mask Defect Inspection Equipment Production Market Share Comparison (2019 & 2023 & 2030)
 Figure 26. United States VS China: EUV Mask Defect Inspection Equipment Consumption Market Share Comparison (2019 & 2023 & 2030)
 Figure 27. United States Based Manufacturers EUV Mask Defect Inspection Equipment Production Market Share 2023
 Figure 28. China Based Manufacturers EUV Mask Defect Inspection Equipment Production Market Share 2023
 Figure 29. Rest of World Based Manufacturers EUV Mask Defect Inspection Equipment Production Market Share 2023
 Figure 30. World EUV Mask Defect Inspection Equipment Production Value by Type, (USD Million), 2019 & 2023 & 2030
 Figure 31. World EUV Mask Defect Inspection Equipment Production Value Market Share by Type in 2023
 Figure 32. 5-7nm Process
 Figure 33. 3nm and Below Process
 Figure 34. World EUV Mask Defect Inspection Equipment Production Market Share by Type (2019-2030)
 Figure 35. World EUV Mask Defect Inspection Equipment Production Value Market Share by Type (2019-2030)
 Figure 36. World EUV Mask Defect Inspection Equipment Average Price by Type (2019-2030) & (USD/Unit)
 Figure 37. World EUV Mask Defect Inspection Equipment Production Value by Application, (USD Million), 2019 & 2023 & 2030
 Figure 38. World EUV Mask Defect Inspection Equipment Production Value Market Share by Application in 2023
 Figure 39. Mask Shop
 Figure 40. Fab
 Figure 41. World EUV Mask Defect Inspection Equipment Production Market Share by Application (2019-2030)
 Figure 42. World EUV Mask Defect Inspection Equipment Production Value Market Share by Application (2019-2030)
 Figure 43. World EUV Mask Defect Inspection Equipment Average Price by Application (2019-2030) & (USD/Unit)
 Figure 44. EUV Mask Defect Inspection Equipment Industry Chain
 Figure 45. EUV Mask Defect Inspection Equipment Procurement Model
 Figure 46. EUV Mask Defect Inspection Equipment Sales Model
 Figure 47. EUV Mask Defect Inspection Equipment Sales Channels, Direct Sales, and Distribution
 Figure 48. Methodology
 Figure 49. Research Process and Data Source

Companies Mentioned

Lasertec
KLA-Tencor
Advantest